JPS629712Y2 - - Google Patents

Info

Publication number
JPS629712Y2
JPS629712Y2 JP18306980U JP18306980U JPS629712Y2 JP S629712 Y2 JPS629712 Y2 JP S629712Y2 JP 18306980 U JP18306980 U JP 18306980U JP 18306980 U JP18306980 U JP 18306980U JP S629712 Y2 JPS629712 Y2 JP S629712Y2
Authority
JP
Japan
Prior art keywords
semiconductor substrates
semiconductor substrate
semiconductor
holder
substrates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP18306980U
Other languages
English (en)
Japanese (ja)
Other versions
JPS57104522U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18306980U priority Critical patent/JPS629712Y2/ja
Publication of JPS57104522U publication Critical patent/JPS57104522U/ja
Application granted granted Critical
Publication of JPS629712Y2 publication Critical patent/JPS629712Y2/ja
Expired legal-status Critical Current

Links

JP18306980U 1980-12-18 1980-12-18 Expired JPS629712Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18306980U JPS629712Y2 (en]) 1980-12-18 1980-12-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18306980U JPS629712Y2 (en]) 1980-12-18 1980-12-18

Publications (2)

Publication Number Publication Date
JPS57104522U JPS57104522U (en]) 1982-06-28
JPS629712Y2 true JPS629712Y2 (en]) 1987-03-06

Family

ID=29982004

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18306980U Expired JPS629712Y2 (en]) 1980-12-18 1980-12-18

Country Status (1)

Country Link
JP (1) JPS629712Y2 (en])

Also Published As

Publication number Publication date
JPS57104522U (en]) 1982-06-28

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